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Post etch residue and resin removers and cleaners for semiconductor applications.

Post Etch Residue (PER) Cleaners

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Post Etch Residue Cleaning for Wafer Level Surface Prep


Technic manufactures a variety of proprietary solutions for Post Etch Residue (PER) cleaning for wafer level surface preparation in semiconductor electronics applications. Our chemically safe cleaners have extremely high metal compatibility for a wide variety of substrates and can be used in combination with all types of production tools.  

TechniClean IK73

TechniClean IK73 is specially formulated to target the selective removal of highly-inert chemical residues created during the patterning of high-k dielectric metal oxides including hafnium, zirconium and tantalum oxides. TechniClean IK73 functions well at room temperature and is easily rinsed. The process is suitable in immersion, batch-spray, and single-wafer chemical applications.

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Post Etch Residue remover, semi-aqueous, TechniClean CA25

TechniClean CA25

TechniClean CA25 is a semi-aqueous proprietary blend that has been formulated to address post etch residue (PER) removal in pinched-through via and metal lines for all interconnect and technology nodes. This advanced residue cleaner offers a unique blend of ingredients that have been proven to be extremely efficient at quickly and selectively removing organo-metal oxides from the following materials: Al, Cu, Ti, TiN, W and Ni.

TechniClean CA25 has been designed to provide an optimum balance of surface wetting, reduced potential, chelating capacity and residue solubility to accomplish complete PER dissolution at a low temperature and short processing time for various electronic features such as lines, vias and pads. 

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Post CMP slurry residue remover on Si and SiO2 substrates, TechniClean PCE7

TechniClean PCE7

TechniClean PCE7 is an organic proprietary mixture that has been designed to address post-CMP Ceria slurry residues removal on Si and SiO2 substrates.  The solution was also showing additional attributes such as epoxy and nitrocellulose based resin dissolution.  

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Aqueous post tungsten CMP solution for cleaning in semiconductor applications, TechniClean PCW6

TechniClean PCW6

TechniClean PCW6 is an aqueous post tungsten CMP solution based on additives designed to address concomitantly: particle electrostatic repulsion, sequestration, dispersion and the strong chelating property of metal ions.  

The cleaning performance can be tunes at PoU by simple water dilution.  A dilution ratio of 1 to 25 is generally a great compromise to achieve surface cleaning, low defectivity, low ion surface contamination and low via resistance while allowing a low process CoO.

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  • Applications
    • Semiconductor
      • Fabrication & Packaging Chemistry
        • Copper
        • Nickel & Tin
        • Precious Metals
        • Photoresist Strippers
        • Metal Etchants
        • Cleaners
      • High Purity Chemistry
      • Equipment: Research & Development
    • Components, Lead Frames, Connectors
      • ECLC Chemistry
        • Connectors
        • Lead Frames/LED Substrate Applications
        • Active & Passive Components
      • ECLC Equipment
    • Printed Circuit Boards
      • Chemistry
        • Final Finishes
          • ENIG & ENEPIG
        • Electrolytic Copper
        • Electrolytic Nickel & Precious Metals
        • Metallization
        • Microetchants
      • Imaging Products
      • Process Control - EBA
      • Equipment
    • Industrial
      • Process Chemistry
      • Equipment
      • Anodizing Chemistry
      • Anodizing Equipment
    • Solar
      • Chemistry
      • TechniSol UV-PR
      • Engineered Powder & Flake
    • Decorative
      • Cleaners & Pretreatment
      • Plating Chemistry
      • Colorings, Coatings, and Paints
      • Post Treatment
      • Equipment
    • Medical
      • Chemistry
      • Equipment
    • 3D-Printing
      • Chemistry
      • Equipment
    • Application Support
      • Application Guides
      • Application Notes
  • Chemistry
  • Equipment
    • Automated Systems
      • Hoist Systems
        • Cantilever/Sidearm
        • Rail/Rim Runner
        • Overhead Hoist
        • Hoist Automation
        • Hoist Retrofits
      • Batch Systems
        • Barrels
        • Vibratory
        • SBE Technology
      • Loose Parts Processing Systems
        • Single Parts (MP300)
        • Selective Pin (CDP2000)
        • Panels (MP100)
        • Cut Strip (Leadframes)
        • Finger Plater (FFP)
        • Single Piece (MP500)
      • Continuous
        • Reel to Reel
        • Roll-to-Roll (MP200)
      • Turnkey
    • Capabilities
      • Advanced Engineered Systems
    • Manual Lines
      • Wet Benches/Modules
      • Tank Lines
    • Laboratory and R&D
      • Mini Lines
      • High Speed Reel to Reel Test Cells
      • Wafer Plating Test Cells
    • Parts, Supplies & Accessories
      • Consoles, Work Stations, Hoods, Benches & Tables
      • Mazerustar Planetary Mixers
        • Demonstration Videos
      • Amp Hour Meters, Timers & Chemical Feeders
      • Anodes, Baskets, Bags & Hooks
      • Filtration
      • Precious Metal Recovery
      • Rectifiers
      • Tanks & Auxiliary Equipment
      • Ultrasonic and Aqueous Cleaners & Dryers
      • Selective Plating
    • Process
      • Anodizing
      • Electropolishing
  • Engineered Powders
    • Applications
    • Products
    • Global Representatives
    • Equipment
      • Conductivity Test Apparatus
        • Tape Application Jig
    • Engineered Powders Support
    • Engineered Powders News
    • Engineered Powders Resources
  • Analytical Controls
    • Capabilities
      • Electroanalytical Methods
      • Data Analysis
      • Volumetric Analysis
    • Process Control Products
      • Real Time Analyzer (RTA)
        • RTA 3D
        • RTA Classic
        • ACE
        • SSF RTA 3D
        • PHD Option
      • EBA
        • EBA 3D
        • EBA 3D: Plus Option
        • EBA Classic
        • Technic Elevate Analyzer
      • Automatic Process Titrator
        • Maestro
        • NextChem Analyzer Support
    • Electrochemical Research Instrumentation
  • About
    • Contact Us
    • News & Events
      • Upcoming Trade Shows
      • Recent Trade Shows
    • Environmental Stewardship
    • Industry Partners
    • Conflict Minerals Reporting
    • Resources
      • Resource Library
      • Videos
      • Useful Tools
      • Daily Metal Prices
      • FAQ
    • Careers
      • Drafter/Mechanical Designer
      • Senior Mechanical Engineer
    • Global Facilities
    • Technic SDS Access