Standard Solution-Free RTA 3D
Standard-Solution-Free RTA Configuration
- Readiness of a probe to take a reliable measurement can be automatically confirmed at any time.
- RTA employs a set of pre-calibrated probes.
- RTA Electrodes do not deteriorate with time (no-drift, stable electrodes).
- RTA uses state of the art self-diagnosis during every single measurement.
Hardware -variety of electronic tests, pump test, probe test
Diagnostic Voltammograms - outlier detection for every single voltammogram
- No need for in-house manual standard preparation eliminates possible exposure to chemicals
- No-waste configuration eliminates need for disposing chemicals
- No-need-for-standards configuration eliminates needs for consumable chemicals
The combination of no-waste and no-need-for-standards configuration provides the “GREENEST” metrology for copper damascene process available commercially.